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공공누리This item is licensed Korea Open Government License

Title
반도체 플라즈마 공정장비 지능화 기술 개발 및 실증
Alternative Title
Development and demonstration of intelligent technology for semiconductor plasma processing equipment
Author(s)
유진승
Publisher
국가과학기술연구회
Publication Year
2021
Keyword
공정장비; 부품 생산; 운영; 관리 상태데이터
Files in This Item:
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Appears in Collections:
7. KISTI 연구성과 > 연구보고서 > 2021
Type
Report
URI
https://repository.kisti.re.kr/handle/10580/17132
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