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This item is licensed Korea Open Government License
- dc.contributor.author
- 유진승
- dc.date.accessioned
- 2022-06-27T05:54:55Z
- dc.date.available
- 2022-06-27T05:54:55Z
- dc.date.issued
- 2021
- dc.identifier.other
- G-20-GM-0004-R
- dc.identifier.uri
- https://repository.kisti.re.kr/handle/10580/17132
- dc.publisher
- 국가과학기술연구회
- dc.title
- 반도체 플라즈마 공정장비 지능화 기술 개발 및 실증
- dc.title.alternative
- Development and demonstration of intelligent technology for semiconductor plasma processing equipment
- dc.type
- Report
- dc.contributor.affiliation
- 한국과학기술정보연구원
- dc.contributor.affiliation
- KISTI
- dc.identifier.localId
- 8100345
- dc.subject.keyword
- 공정장비
- dc.subject.keyword
- 부품 생산
- dc.subject.keyword
- 운영
- dc.subject.keyword
- 관리 상태데이터
- Appears in Collections:
- 7. KISTI 연구성과 > 연구보고서 > 2021
- Files in This Item:
- There are no files associated with this item.
