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공공누리This item is licensed Korea Open Government License

Title
Phase Transformation and Physical Properties of A lN-Co Film
Author(s)
오창섭길상철
Publication Year
2013-05-31
Abstract
Annealing techniques were applied to induce phase transformations and phase separations in AlN-Co thin films with various Co contents and AlN-Co multilayer thin films with various layer-thicknesses were prepared by a two-facing-target type DC sputtering system. X-ray diffraction and electron diffraction techniques were used to examine the behaviour of phase ansformations and phase separations. The transmission electron microscopy was also used to evaluate the microstructure changes in the films. Magnetization and resistivity of the films were evaluated by vibration sample magnetometer and four-probe method respectively. It was found that magnetization and resistivity were sensitive to the phase transformations and phase separations as well as the changes in the microstructure of the films.
Keyword
Phase transformations; A lN-Co thin films; Microstructure; Physical Properties
Journal Title
Asian journal of chemistry
ISSN
0970-7077
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Appears in Collections:
7. KISTI 연구성과 > 학술지 발표논문
URI
https://repository.kisti.re.kr/handle/10580/14234
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