download0 view704
twitter facebook

공공누리This item is licensed Korea Open Government License

dc.contributor.author
오창섭
dc.contributor.author
길상철
dc.date.accessioned
2019-08-28T07:41:26Z
dc.date.available
2019-08-28T07:41:26Z
dc.date.issued
2013-05-31
dc.identifier.issn
0970-7077
dc.identifier.uri
https://repository.kisti.re.kr/handle/10580/14234
dc.description.abstract
Annealing techniques were applied to induce phase transformations and phase separations in AlN-Co thin films with various Co contents and AlN-Co multilayer thin films with various layer-thicknesses were prepared by a two-facing-target type DC sputtering system. X-ray diffraction and electron diffraction techniques were used to examine the behaviour of phase ansformations and phase separations. The transmission electron microscopy was also used to evaluate the microstructure changes in the films. Magnetization and resistivity of the films were evaluated by vibration sample magnetometer and four-probe method respectively. It was found that magnetization and resistivity were sensitive to the phase transformations and phase separations as well as the changes in the microstructure of the films.
dc.language
eng
dc.relation.ispartofseries
Asian journal of chemistry
dc.title
Phase Transformation and Physical Properties of A lN-Co Film
dc.subject.keyword
Phase transformations
dc.subject.keyword
A lN-Co thin films
dc.subject.keyword
Microstructure
dc.subject.keyword
Physical Properties
Appears in Collections:
7. KISTI 연구성과 > 학술지 발표논문
Files in This Item:
There are no files associated with this item.

Browse