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7. KISTI 연구성과
발간 단행본
2010
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This item is licensed Korea Open Government License
Title
CVD 공정용 Shower head 개발
Author(s)
강상규
;
김재성
;
김현일
Publisher
한국과학기술정보연구원
Publication Year
2010-11-01
Journal Title
기술시장 보고서
ISBN
978-89-6211-590-1 (93500)
Files in This Item:
2010-150 CVD 공정용 shower head개발.pdf
6.55 MB
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Appears in Collections:
3. 데이터기반 정보분석
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발간단행본
7. KISTI 연구성과
>
발간 단행본
>
2010
Type
Book
URI
https://repository.kisti.re.kr/handle/10580/6932
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