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This item is licensed Korea Open Government License
- dc.contributor.author
- 강상규
- dc.contributor.author
- 김재성
- dc.contributor.author
- 김현일
- dc.date.accessioned
- 2018-10-05T10:27:39Z
- dc.date.available
- 2018-10-05T10:27:39Z
- dc.date.issued
- 2010-11-01
- dc.identifier.isbn
- 978-89-6211-590-1 (93500)
- dc.identifier.uri
- https://repository.kisti.re.kr/handle/10580/6932
- dc.format
- application/pdf
- dc.publisher
- 한국과학기술정보연구원
- dc.relation.ispartofseries
- 기술시장 보고서
- dc.title
- CVD 공정용 Shower head 개발
- dc.type
- Book
- Appears in Collections:
- 3. 데이터기반 정보분석 > 발간단행본
7. KISTI 연구성과 > 발간 단행본 > 2010
- Files in This Item:
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2010-150 CVD 공정용 shower head개발.pdf6.55 MBDownload
