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공공누리This item is licensed Korea Open Government License

dc.contributor.author
강상규
dc.contributor.author
김재성
dc.contributor.author
김현일
dc.date.accessioned
2018-10-05T10:27:39Z
dc.date.available
2018-10-05T10:27:39Z
dc.date.issued
2010-11-01
dc.identifier.isbn
978-89-6211-590-1 (93500)
dc.identifier.uri
https://repository.kisti.re.kr/handle/10580/6932
dc.format
application/pdf
dc.publisher
한국과학기술정보연구원
dc.relation.ispartofseries
기술시장 보고서
dc.title
CVD 공정용 Shower head 개발
dc.type
Book
Appears in Collections:
3. 데이터기반 정보분석 > 발간단행본
7. KISTI 연구성과 > 발간 단행본 > 2010
Files in This Item:
Thumbnail 2010-150 CVD 공정용 shower head개발.pdf6.55 MBDownload

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