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공공누리This item is licensed Korea Open Government License

Title
Efficiency Enhancement of PIC-MCC Modeling for Magnetron Sputtering Simulations Using GPU Parallel
Author(s)
손일엽김지훈배준경이진필
Publication Year
2016-08-02
Abstract
A particle-in-cell Monte Carlo collision (PIC-MCC) model is presented, parallelized to be suitable for magnetron sputtering simulations ongeneral purpose graphics processing units (GPGPUs). To reduce the large computation time generally required to calculate particleelectromagneticfield interactions, a numerical algorithm is optimized to obtain the best performance with GPGPU parallelization. Theefficiency and accuracy of the GPGPU parallelized PIC-MCC model are examined by comparing the calculated results and the correspondingcomputational time with analytical solutions and the computation time of the serial code, respectively. The erosion and deposition ratesduring sputtering predicted using this model are in good agreement with experimental results. The newly developed PIC-MCC model withGPGPU parallelization is thereby shown to be both efficient and accurate.
Keyword
Plasma; GPU; Magnetron Sputtering; Monte Carlo Collision; Particle in Cell
Journal Title
IEEE Transactions on Plasma Science
Citation Volume
44
ISSN
0093-3813
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7. KISTI 연구성과 > 학술지 발표논문
URI
https://repository.kisti.re.kr/handle/10580/14523
http://www.ndsl.kr/ndsl/search/detail/article/articleSearchResultDetail.do?cn=NART76342513
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