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공공누리This item is licensed Korea Open Government License

Title
Prediction of surface and adhesion energies of nanoimprint lithography materials and anti-sticking layers by molecular dynamics simulation
Author(s)
강지훈
Publication Year
2012-02-18
Abstract
Moleculardynamics(MD)simulationsareperformedtocalculatethesurfaceandadhesionenergies
ofnanoimprintlithographymaterials.TheproposedsimulationmodelsincludeanamorphousSiO2,an
amorphouspoly(methylmethacrylate)filmandself-assembledmonolayersasanti-stickinglayers.Forthe
calculationofthesurfaceandadhesionenergies,anobleMDmethodissuggestedtotakeintoaccount
thetemperatureeffect,calculatingthepotentialenergydifferencebetweenthecontactingandseparate
surfaces.Theresultsofsimulationsarecomparedwiththeresultsofexperimentsobtainedfromliquid
contactanglemeasurementsandpreviousreferences.Therelativeerrorbetweensimulationsand
experimentsisabout10%forpoly(methylmethacrylate)andself-assembledmonolayers,andabout20%
foramorphousSiO2,respectively.ItisconcludedthatthesuggestedMDsimulationmodelhasgivena
satisfactorypredictionofsurfaceandadhesionenergiesandcouldprovidemoreaccurateresultswith
thehelpofimprovedforcefields.
Keyword
Moleculardynamicssimulation; Surfaceandadhesionenergy; Anti-stickingmaterials
Journal Title
Appliedsurfacescience
Citation Volume
258
ISSN
0169-4332
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Appears in Collections:
7. KISTI 연구성과 > 학술지 발표논문
URI
https://repository.kisti.re.kr/handle/10580/14088
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