The influence of thermally induced strain on quality factor of MgTiO3 ceramics at microwave frequencies via far-infrared reflectivity spectra and X-ray diffraction was investigated as a function of cooling rate. As the cooling rate increased, the crystallographic strain increased and Q¡¤f value decreased, which were confirmed via X-ray diffraction and far-infrared reflectivity spectra. This result was attributed to the thermally induced strain and lattice anharmonicity.