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This item is licensed Korea Open Government License
- dc.date.accessioned
- 2018-11-02T04:56:43Z
- dc.date.available
- 2018-11-02T04:56:43Z
- dc.date.issued
- 2014-09
- dc.identifier.other
- ED0205
- dc.identifier.uri
- https://repository.kisti.re.kr/handle/10580/11256
- dc.identifier.uri
- http://www.ndsl.kr/ndsl/search/detail/report/reportSearchResultDetail.do?cn=TRKO201500013405
- dc.description
- funder : 중소기업청
- dc.description.abstract
- 비공개항목입니다.
- dc.description.abstract
- 비공개항목입니다.
- dc.publisher
- 한국과학기술정보연구원
- dc.publisher
- Korea Institute of Science and Technology Information
- dc.title
- 대면적 증착용 Magnetron Sputter 시뮬레이터 개발
- dc.identifier.localId
- TRKO201500013405
- dc.subject.keyword
- 마그네트론스퍼터
- dc.subject.keyword
- 입자 시뮬레이션
- dc.subject.keyword
- 금속 증착
- dc.subject.keyword
- 병렬 처리
- dc.subject.keyword
- 연동해석
- dc.type.local
- 최종보고서
- dc.identifier.koi
- KISTI2.1015/RPT.TRKO201500013405
- Appears in Collections:
- 7. KISTI 연구성과 > 연구보고서 > 2014
- Files in This Item:
- There are no files associated with this item.
